Anisotropic etching of semiconductor structures
Etching of ultra-fragile materials
Defect removal from EUV masks
Atomic-level smoothing of optical surfaces
Increase Laser-Induced Damage Threshold (LIDT)
Surface nano-texturing
Creation of hydrophilic surfaces
Improved coating adhesion
Oxidation-resistant surfaces
Free-standing carbon film
Creation of nano-membranes
Improved biocompatibility of medical devices
Reduced pathogen adhesion
Native polymer-free drug elution barrier